Nicole

Microelectromechanical systems (MEMS)

Microelectromechanical systems (MEMS) have roots in the silicon revolution, which can be traced back to two important silicon semiconductor inventions from 1959: the monolithic integrated circuit (IC) chip by Robert Noyce at Fairchild Semiconductor, and the MOSFET (metal-oxide-semiconductor field-effect transistor, or MOS transistor) by Mohamed M. Atalla and Dawon Kahng at Bell Labs. MOSFET scaling, …

Microelectromechanical systems (MEMS) Read More »